PI releases high dynamics linear motor stage family - The Robot Report

PI Physik Instrumente L.P. has introduced the V-573 family, a new series of high-dynamics linear motor stages designed for ultra-precise positioning in research and industrial applications. Manufactured in the U.S., these stages feature frictionless three-phase linear motors, crossed roller bearings for high stiffness and smooth operation, and offer specifications such as up to 360mm travel, 1nm absolute encoder resolution, 80nm bidirectional repeatability, and velocities up to 500mm/sec with 1g acceleration. The design emphasizes precision with straightness and flatness values as low as 1µm, and includes an anti-creep mechanism to enhance reliability. The stages integrate with PI’s ACS-based EtherCAT motion controllers, enabling optimized system performance through advanced algorithms. The V-573 stages are suitable for a broad range of industries including semiconductor manufacturing (nano-lithography, wafer inspection, metrology), silicon photonics, quantum computing, industrial automation, microscopy, and life sciences